능동형 체크 밸브를 이용한 고출력 압전 마이크로펌프

TL;DRAbstract

A novel piezoelectric micropump using active check valves in place of conventional passive check valves in inlet and outlet has been proposed and investigated. It actively controls open/close motion of check valves using piezoelectric actuator for expansion/contraction of pump chamber. In this paper, bi-directional flow characteristics and load characteristics are experimentally investigated using an adequate timing control for valve closing motion with a prototype micropump fabricated with the effective size of 17×8×11mm3. From the experimental results, it is ascertained that optimal values of phase shift against voltage to drive pump chamber for realization of a miniaturized but powerful micropump, are 15° in inlet check valve and 195° in outlet. Based on the obtained results, a sheet-type active shuttle valve that has a unified valve-body for inlet and outlet check valves is proposed. A micropump with the effective size of 10×10×10mm3 is fabricated and basic characteristics a

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