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Article10.1016/0924-4247(92)80085-h

A subminiature capacitive movement detector using a composite membrane suspension

Robert Puers,Simen Vergote-1992-03-01-Sensors and Actuators A Physical

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Keywords

Materials science Capacitive sensing Deflection (physics)Composite material Stress (linguistics)Composite number Sensitivity (control systems)Fabrication

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