Book Chapter10.1007/978-1-4684-8205-8_33

Ion Beam Deposition of Ceramic-Like Coatings

C. Weißmantel,K. Bewilogua,Klaus Breuer,J. Erler,B. Rau,G. Reiße+1 more-1984-01-01

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Keywords

Deposition (geology)Ion beamIonIon platingPlasmaIon beam depositionMaterials scienceSputter deposition

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