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應用田口法之低介電常數材料(掺碳氧化矽)研究
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應用田口法之低介電常數材料(掺碳氧化矽)研究
游璨瑋
,
Tsan-Wei Yu
,
朝春光
,
Chuen-Guang Chao
-
2000-01-01
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Physics
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