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Open AccessArticle10.4229/24theupvsec2009-3bv.4.2

Effects of the Hydrogen Dilution in a-Si:H Film on the Crystallization and Bandgap Shift

Hae‐Kwon Jeong,Im, J.-S.,Js Im,Boo, S.-2009-01-01-EU PVSEC
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TL;DRAbstract

We investigate effects of the hydrogen dilution in a-Si:H film on the crystallization and absoption property. Crystallization of the a-Si:H films from amorphous to several tens nanometer-sized crystal state is observed by increase of hydrogen dilution ratio using PECVD. Crystallization of the a-Si:H films from amorphous to microcrystal occurred very rapidly in a very narrow range of silane concentration(S.C.) starting with S.C.=~1.8%. Protocrystal silicon (pc-Si:H) is only obtained fractionally within the a-Si:H matrix. It could be assumed that the volume fraction of the protocrystalline silicon is higher in the range of SC=1.6~1.8% than in the other region where amorphous or micro-crystalline phases are dominat. The a-Si:H films with SC=1.6%~1.4% have the crystal volume fraction 73%~80% but still contain the amorphous, proto- or nano- crystalline silicon in the rest volume so that they show some different characteristics with other micro-crystalline silicon. As an application the high

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We investigate effects of the hydrogen dilution in a-Si:H film on the crystallization and absoption property. Crystallization of the a-Si:H films from amorphous to several tens nanometer-sized crystal state is observed by increase of hydrogen dilution ratio using PECVD. Crystallization of the a-Si:H films from amorphous to microcrystal occurred very rapidly in a very narrow range of silane concentration(S.C.) starting with S.C.=~1.8%. Protocrystal silicon (pc-Si:H) is only obtained fractionally within the a-Si:H matrix. It could be assumed that the volume fraction of the protocrystalline silicon is higher in the range of SC=1.6~1.8% than in the other region where amorphous or micro-crystalline phases are dominat. The a-Si:H films with SC=1.6%~1.4% have the crystal volume fraction 73%~80% but still contain the amorphous, proto- or nano- crystalline silicon in the rest volume so that they show some different characteristics with other micro-crystalline silicon. As an application the high

Keywords

CrystallizationBand gapMaterials scienceHydrogenDilutionWide-bandgap semiconductorOptoelectronicsChemical engineering

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