Book Chapter10.1007/978-94-010-0339-1_23

On Scaling the Thin Film Si Thickness of SOI Substrates

Karl D. Hobart,Fritz J. Kub,M. E. Twigg,M. Fatemi-2002-01-01

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Keywords

Silicon on insulatorCMOSScalingFabricationMaterials scienceSubstrate (aquarium)OptoelectronicsThin film

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