Article10.1007/s11180-005-0020-9

Borophosphosilicate glass films in silicon microelectronics, part 2: Structure and applications

V. Yu. Vasil’ev-2005-03-01-Russian Microelectronics

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Keywords

MicroelectronicsMaterials scienceSiliconDielectricEngineering physicsThin filmOptoelectronicsNanotechnology

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