Electron Beam Nanolithography

doi:https://doi.org/10.1007/978-3-642-71446-7_3

Book Chapter10.1007/978-3-642-71446-7_3

Electron Beam Nanolithography

C.D.W. Wilkinson,S.P. Beaumont-1986-01-01-Springer proceedings in physics

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Keywords

Electron-beam lithographyLithographyNext-generation lithographyLaser linewidthNanolithographyMaterials scienceOptoelectronicsVery-large-scale integration

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