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CHARACTERIZATION OF RAPID ELECTRON-BEAM ANNEALED THIN TITANIUM SILICIDE FILMS

V.K. Raman,Farrukh ibne Mahmood,R.A. McMahon,H. Ahmed,C. Jeynes,Kw Hutt+2 more-1988-03-01-View
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Keywords

Materials scienceCharacterization (materials science)Thin filmTitaniumMetallurgySilicideAnnealing (glass)Optoelectronics

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