Book Chapter10.1016/s0080-8784(08)60246-x

Chapter 3 Characterization Techniques for Oxygen in Silicon

Thomas J. Shaffner,D.K. Schroder-1994-01-01-Semiconductors and semimetals

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Keywords

Characterization (materials science)SiliconMaterials scienceOxygenOptoelectronicsNanotechnologyChemistryOrganic chemistry

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