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氢等离子体对（Pt及其硅化物）/Si界面的杂质/缺陷态和势垒的影响
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氢等离子体对（Pt及其硅化物）/Si界面的杂质/缺陷态和势垒的影响
丁孙安
,
许振嘉
-
1994-01-01
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Computer science
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