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Open AccessArticle10.12693/aphyspola.81.169

Inelastic Mean Free Paths of Low-Energy Electrons in Solids

Shigeo Tanuma,C. J. Powell,David R. Penn-1992-02-01-Acta Physica Polonica A
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TL;DRAbstract

We present a summary of recent calculations of the electron ineastic mean free paths (IMFPs) of 50-2000 eV electrons in 27 elements and 15 inorganic compounds. These calcuations are based in part on experimenta optical data to represent the dependence of the inelastic scattering probability on energy loss and the theoretical Lindhard dielectric function to represent the dependence of the scattering probability on momentum transfer. The calculated IMFPs for the elements were fitted to a modified form of the Bethe equation for inelastic electron scattering in matter and the four parameters in this equation were empirically related to other material parameters. The resuting formula, designated PP-2, provides a convenient means for predicting IMFPs in other materials. We have used two powerful integral equations or sum rules to evaluate the optica data on which our IMFP calculations are based. While the optical data for the eements satisfied these sum rules to an acceptabe degree, there we

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We present a summary of recent calculations of the electron ineastic mean free paths (IMFPs) of 50-2000 eV electrons in 27 elements and 15 inorganic compounds. These calcuations are based in part on experimenta optical data to represent the dependence of the inelastic scattering probability on energy loss and the theoretical Lindhard dielectric function to represent the dependence of the scattering probability on momentum transfer. The calculated IMFPs for the elements were fitted to a modified form of the Bethe equation for inelastic electron scattering in matter and the four parameters in this equation were empirically related to other material parameters. The resuting formula, designated PP-2, provides a convenient means for predicting IMFPs in other materials. We have used two powerful integral equations or sum rules to evaluate the optica data on which our IMFP calculations are based. While the optical data for the eements satisfied these sum rules to an acceptabe degree, there we

Keywords

ElectronEnergy (signal processing)Atomic physicsMaterials sciencePhysicsNuclear physicsQuantum mechanics

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