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Very large monolayer graphene ribbons grown on SiC

Nicolas Camara,Gemma Rius,Jean Roch Huntzinger,Antoine Tiberj,N. Mestres,Pérez Murano, F.+2 more-2009-01-01-HAL (Le Centre pour la Communication Scientifique Directe)
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TL;DRAbstract

Graphene has emerged recently as a new material with outstanding electronic properties. This includes mass-less Dirac fermions, ballistic transport properties at room temperature and good compatibility with the silicon planar technology. Graphene-based devices are then promising candidates to complement silicon in the future generations of high frequency microelectronic devices. Different techniques have been developed over the past 4 years to fabricate mono or bi-layers of graphene. They range from exfoliated graphite, either mechanically, 1 or in a liquid-phase solution, 2 to chemical vapor deposition on a metal surface, 3,4 and more recently, to substrate-free synthesis when passing ethanol into an argon plasma. 5 The method investigated in this work consists in a controlled sublimation of few atomic layers of Si from a mono crystalline SiC substrate. 6 Such epitaxial growth (EG) of graphene seems to be the most suitable option for industrial applications, 7 but for easy control, it

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Graphene has emerged recently as a new material with outstanding electronic properties. This includes mass-less Dirac fermions, ballistic transport properties at room temperature and good compatibility with the silicon planar technology. Graphene-based devices are then promising candidates to complement silicon in the future generations of high frequency microelectronic devices. Different techniques have been developed over the past 4 years to fabricate mono or bi-layers of graphene. They range from exfoliated graphite, either mechanically, 1 or in a liquid-phase solution, 2 to chemical vapor deposition on a metal surface, 3,4 and more recently, to substrate-free synthesis when passing ethanol into an argon plasma. 5 The method investigated in this work consists in a controlled sublimation of few atomic layers of Si from a mono crystalline SiC substrate. 6 Such epitaxial growth (EG) of graphene seems to be the most suitable option for industrial applications, 7 but for easy control, it

Keywords

GrapheneMaterials scienceSiliconMonolayerMicroelectronicsChemical vapor depositionGraphene oxide paperNanotechnology

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