Book Chapter10.1007/978-1-4615-0563-1_14

Capabilities and Limitations of RBS to Characterize Hyper-Thin Silicon Compound Layers on Various Polymeric Substrates

Gilles Dennler,A. Houdayer,Patrice Raynaud,Y. Ségui,M. R. Wertheimer-2002-01-01

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Keywords

VapoursPolymerPlasma-enhanced chemical vapor depositionMaterials sciencePermeationSiliconOxygenChemical engineering

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