Book Chapter10.1007/978-94-011-5010-1_6

Transduction Principles and Integration of Chemical Sensors into a Micromechanical Array Device

Rüdiger Berger,H.P. Lang,C. Andreoli,Juergen Brügger,M. Despont,P. Vettiger+8 more-1998-01-01

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Keywords

CantileverTransduction (biophysics)NanotechnologyElectronicsNanometreFabricationProcess (computing)Sensitivity (control systems)

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