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Article10.1007/s00339-015-9352-4

Process optimization in high-average-power ultrashort pulse laser microfabrication: how laser process parameters influence efficiency, throughput and quality

Joerg Schille,Lutz Schneider,Udo Loeschner-2015-07-22-Applied Physics A
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Keywords

FemtosecondLaserMaterials scienceFluenceOpticsPicosecondMicrofabricationMachining

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