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Design, Fabrication and Characterization of Micro-Electro-Mechanical Fabry-Perot Interferometer for use in Mid-Wave Infrared

Dmitry A. Kozak-2013-01-01-eScholarship (California Digital Library)
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TL;DRAbstract

Micro-Electro-Mechanical Systems (MEMS) allow scaling down and integration of conventional scientific instrumentation. In particular, advancements in fabrication have made possible the creation of small, precise and inexpensive versions of optical components and systems. Optical components for the use in mid-wave infrared (MWIR) range, 3-5 m wavelength, are of particular interest for their ability to detect various organic chemical compounds and to determine the temperature of objects based on their radiation emission. High sensitivity, but low spectral resolution of optical detectors in the MWIR region requires addition of optical filters to provide spectral information. In this thesis we describe the design, fabrication, and testing of a MEMS-based optical filter that combines a Fabry-Perot interferometer with dielectric Bragg reflectors, using magnetic actuation. The research started with identification of the problem, complete literature search to identify the existing solutions.

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Micro-Electro-Mechanical Systems (MEMS) allow scaling down and integration of conventional scientific instrumentation. In particular, advancements in fabrication have made possible the creation of small, precise and inexpensive versions of optical components and systems. Optical components for the use in mid-wave infrared (MWIR) range, 3-5 m wavelength, are of particular interest for their ability to detect various organic chemical compounds and to determine the temperature of objects based on their radiation emission. High sensitivity, but low spectral resolution of optical detectors in the MWIR region requires addition of optical filters to provide spectral information. In this thesis we describe the design, fabrication, and testing of a MEMS-based optical filter that combines a Fabry-Perot interferometer with dielectric Bragg reflectors, using magnetic actuation. The research started with identification of the problem, complete literature search to identify the existing solutions.

Keywords

FabricationFabry–Pérot interferometerInterferometryOptical filterOpticsMicroelectromechanical systemsMaterials scienceFilter (signal processing)

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