Development of Micro-Dies Using Titanium Super Plastic Alloy
TL;DRAbstract
We have developed a fabrication technique of micro-dies made of titanium super plastic alloy. Shapes of micro silicon structures, which are formed on a silicon substrate by micromachining technique, were imprinted to titanium super plastic alloy using a vacuum press machine at a temperature of 720 °C. We investigated the method to flatten the sidewall of dry-etched silicon structures, and obtained the surface roughness of less than 10 nm. A graded layer of TiN/Ti film, which is deposited on the silicon microstructures by sputtering, was also examined to prevent titanium diffusion into the silicon microstructures during the high temperature pressing. Using the developed technique, a concave titanium super plastic alloy mold for an optical wave-guide was successfully produced, exhibiting filling factor of 99.58%.
Chat with Paper
AI Agents for this Paper
We have developed a fabrication technique of micro-dies made of titanium super plastic alloy. Shapes of micro silicon structures, which are formed on a silicon substrate by micromachining technique, were imprinted to titanium super plastic alloy using a vacuum press machine at a temperature of 720 °C. We investigated the method to flatten the sidewall of dry-etched silicon structures, and obtained the surface roughness of less than 10 nm. A graded layer of TiN/Ti film, which is deposited on the silicon microstructures by sputtering, was also examined to prevent titanium diffusion into the silicon microstructures during the high temperature pressing. Using the developed technique, a concave titanium super plastic alloy mold for an optical wave-guide was successfully produced, exhibiting filling factor of 99.58%.
Keywords
Chat
Click to start Chat