Book Chapter10.1016/s0080-8784(08)63025-2

Chapter 7 Homogeneous Chemical Vapor Deposition

B. A. Scott-1984-01-01-Semiconductors and semimetals

9

Chat with Paper

AI Agents for this Paper

No abstract available for this paper.

Keywords

Chemical vapor depositionHomogeneousSiliconAmorphous solidContext (archaeology)Substrate (aquarium)Plasma-enhanced chemical vapor depositionHydrogen

Chat

Click to start Chat