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Open AccessArticle10.18260/1-2--9498

A Laboratory Information Management System (Lims) For An Undergraduate Microchip Fabrication Facility

Paul Eckerman,R. W. Hendricks-2020-09-03
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TL;DRAbstract

We have built an 1,800 ft 2 Class 10,000 cleanroom dedicated to teaching the elements of the microchip fabrication process to a multidisciplinary cohort of students from all areas of engineering, science, and even the humanities. This laboratory, equipped with educational tools that allow the fabrication of silicon enhancement mode and depletion mode MOSFETs at about 100 micron rules on 4-inch wafers, is capable of handling up to 500 undergraduates per year-an order of magnitude greater than in typical facilities found at other institutions.

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We have built an 1,800 ft 2 Class 10,000 cleanroom dedicated to teaching the elements of the microchip fabrication process to a multidisciplinary cohort of students from all areas of engineering, science, and even the humanities. This laboratory, equipped with educational tools that allow the fabrication of silicon enhancement mode and depletion mode MOSFETs at about 100 micron rules on 4-inch wafers, is capable of handling up to 500 undergraduates per year-an order of magnitude greater than in typical facilities found at other institutions.

Keywords

CleanroomComputer scienceBarcodeWafer fabricationOperating systemSession (web analytics)Data managementWorld Wide Web

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