Book Chapter10.1007/978-94-017-2482-1_10

Correlation between Interface States and Structures Deduced from Atomic-Scale Surface Roughness in Ultrathin SiO2/Si System

Takanori Hattori,Hiroshi Nohira,Kazutoshi Takahashi-2001-01-01

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Keywords

Atomic unitsOxideMaterials scienceSurface roughnessSurface finishCondensed matter physicsElectronic structureInterface (matter)

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