Book Chapter10.1007/978-3-642-71446-7_9

Laser-Induced Growth of Microstructures

Y. Pauleau,G. Auvert-1986-01-01-Springer proceedings in physics

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Keywords

MicroelectronicsMaterials scienceLaserWaferOptoelectronicsSubstrate (aquarium)SiliconEtching (microfabrication)

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