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Dry Film Photoresist Saving Time and Money Without Compromising on Performance

Michael C. Breadmore,Esme Candish,Rosanne M. Guijt-2009-01-01-eCite Digital Repository (University of Tasmania)
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TL;DRAbstract

This paper reports a low budget but fast method for the fabrication of nonhybridmicrodevices in dry film photoresist (DFR). Patterned DFR has beensandwiched between other substrates to form hybrid devices [1; 2; 3]. Wepresent a method for the fabrication of non-hybrid devices in less than 90minutes using equipment costing less than US $1,750. These devices were usedfor the separation of fluorescently labeled sugars by capillary electrophoresiswith an efficiency of over 40,000 plates (2million plates/m) for all analytes. Thefast and simple sealing of DFR devices allowed us to pack particles into themicrochannel before bonding.

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This paper reports a low budget but fast method for the fabrication of nonhybridmicrodevices in dry film photoresist (DFR). Patterned DFR has beensandwiched between other substrates to form hybrid devices [1; 2; 3]. Wepresent a method for the fabrication of non-hybrid devices in less than 90minutes using equipment costing less than US $1,750. These devices were usedfor the separation of fluorescently labeled sugars by capillary electrophoresiswith an efficiency of over 40,000 plates (2million plates/m) for all analytes. Thefast and simple sealing of DFR devices allowed us to pack particles into themicrochannel before bonding.

Keywords

PhotoresistFabricationMicrochannelMaterials scienceAdhesiveNanotechnologyActivity-based costingCapillary action

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