Book Chapter10.1007/978-3-642-19692-8_62

Analysis and Quantification of Improvement in Green Manufacturing Process of Silicon Nitride Products

Nozomu Mishima,Shinsuke Kondoh,Hideki Hyuga,You Zhou,Kiyoshi Hirao-2011-01-01

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Keywords

Silicon nitrideMaterials scienceNanotechnologySiliconOptoelectronics

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