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Fabrication and Characterization of a PMMA Capacitive Micro accelerometer based on Thermal Imprint Method
Satoshi Amaya,Dzung Viet Dao,Susumu Saito-2011-01-01-Griffith Research Online (Griffith University, Queensland, Australia)
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Keywords
FabricationAccelerometerCapacitive sensingCharacterization (materials science)ThermalMaterials scienceMechanical engineeringEngineering
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