Book Chapter10.1016/s0080-8784(08)60120-9

Chapter 2 InAs-Alloyed GaAs Substrates for Direct Ion Implantation

Harvey Winston,A. T. Hunter,Hiroshi Kimura,Robert E. Lee-1988-01-01-Semiconductors and semimetals

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Keywords

WaferMaterials scienceSubstrate (aquarium)FabricationOptoelectronicsIon implantationImpurityAlloy

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