Article10.1016/j.nimb.2015.07.089
Sputtering of amorphous silicon nitride irradiated with energetic C60 ions: Preferential sputtering and synergy effect between electronic and collisional sputtering
T. Kitayama,Yukari Morita,K. Nakajima,Kazumasa Narumi,Yoichi Saitoh,M. Matsuda+3 more-2015-07-27-Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
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Keywords
SputteringIrradiationAmorphous solidIonMaterials scienceSiliconSublimation (psychology)Analytical Chemistry (journal)
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