Atomic Scale Morphology of Thin Au(Zn)/GaAs Ohmic Contacts
E. Kamińska,A. Piotrowska,R. Żarecka,A. Barcz,E. Mizera,S. Kwiatkowski-1992-11-01-Acta Physica Polonica A
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TL;DRAbstract
Very thin Au(Zn) contacts to p-GaAs were studied by means of transmission electron microscopy and secondary ion mass spectrometry. It was found that such contacts when cap annealed became ohmic, even though the reaction between the metallization and GaAs is confined to a very close vicinity of the interface.
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Very thin Au(Zn) contacts to p-GaAs were studied by means of transmission electron microscopy and secondary ion mass spectrometry. It was found that such contacts when cap annealed became ohmic, even though the reaction between the metallization and GaAs is confined to a very close vicinity of the interface.
Keywords
Ohmic contactMaterials scienceAtomic unitsMorphology (biology)Scale (ratio)NanotechnologyPhysicsGeology
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