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A spectroscopic and diagnostic study of laser plasma generation and evolution under multi-variable target conditioning

P.D. Yeates-2004-01-01-Dublin City University Open Access Institutional Repository (Dublin City University)

TL;DRAbstract

The spectroscopic and electrostatic properties of laser generated plasmas under the influence of different target configurations have been investigated Three main diagnostic techniques have been employed Firstly, time and space resolved EUV(7-45nm) emission spectroscopy was used for timescales during and up to 35nsec after the laser pulse Secondly, space and time resolved visible (273-620nm) emission spectroscopy and fast frame visible imaging, was used for timescales during and up to 600nsec after the laser pulse Finally, ion and electron probes, sampled the temporal range from 800nsec onwards after the laser pulse.
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\nThese three techniques, distinct in the space-time envelope in which they are applicable, divided the work into three regimes of the plasma lifetime under study, these were termed, ‘near field’, ‘intermediate field’ and finally, ‘far field’.
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\nFor EUV(near field) studies, laser plasma generation and evolution within rectangular cavities was studied

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The spectroscopic and electrostatic properties of laser generated plasmas under the influence of different target configurations have been investigated Three main diagnostic techniques have been employed Firstly, time and space resolved EUV(7-45nm) emission spectroscopy was used for timescales during and up to 35nsec after the laser pulse Secondly, space and time resolved visible (273-620nm) emission spectroscopy and fast frame visible imaging, was used for timescales during and up to 600nsec after the laser pulse Finally, ion and electron probes, sampled the temporal range from 800nsec onwards after the laser pulse.
\n
\nThese three techniques, distinct in the space-time envelope in which they are applicable, divided the work into three regimes of the plasma lifetime under study, these were termed, ‘near field’, ‘intermediate field’ and finally, ‘far field’.
\n
\nFor EUV(near field) studies, laser plasma generation and evolution within rectangular cavities was studied

Keywords

PlasmaLaserExtreme ultraviolet lithographyAtomic physicsIonizationSpectroscopyElectronElectron temperature

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