Journal
Microsystem Technologies
Springer Science+Business Media. Advanced MEMS and NEMS Technologies. 7,019 works and 90,384 citations indexed by CitedEvidence.
Works
7,019
Citations
90,384
H-index
83
ISSN
0946-7076
Open access
No
Impact
2.45
Research Topics
Advanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsAcoustic Wave Resonator TechnologiesMicrofluidic and Capillary Electrophoresis ApplicationsAdhesion, Friction, and Surface InteractionsAdvanced Surface Polishing TechniquesNanofabrication and Lithography TechniquesAdvanced Sensor and Energy Harvesting MaterialsForce Microscopy Techniques and ApplicationsMicrofluidic and Bio-sensing Technologies