Journal
Journal of Vacuum Science and Technology
American Institute of Physics. Semiconductor materials and devices. 5,546 works and 119,764 citations indexed by CitedEvidence.
Works
5,546
Citations
119,764
H-index
126
ISSN
0022-5355
Open access
No
Impact
Not available
Research Topics
Semiconductor materials and devicesElectron and X-Ray Spectroscopy TechniquesMetal and Thin Film MechanicsIon-surface interactions and analysisSurface and Thin Film PhenomenaSemiconductor materials and interfacesAdvanced Chemical Physics Studiesnanoparticles nucleation surface interactionsCopper Interconnects and ReliabilityAdvancements in Photolithography Techniques