Journal
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
Semiconductor materials and devices. 4,361 works and 45,444 citations indexed by CitedEvidence.
Works
4,361
Citations
45,444
H-index
62
ISSN
2166-2746
Open access
No
Impact
1.68
Research Topics
Semiconductor materials and devicesAdvancements in Photolithography TechniquesIntegrated Circuits and Semiconductor Failure AnalysisGaN-based semiconductor devices and materialsNanofabrication and Lithography TechniquesZnO doping and propertiesIon-surface interactions and analysisNanowire Synthesis and ApplicationsSemiconductor Quantum Structures and DevicesAdvancements in Semiconductor Devices and Circuit Design