Journal
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
American Institute of Physics. Semiconductor materials and devices. 17,994 works and 395,954 citations indexed by CitedEvidence.
Works
17,994
Citations
395,954
H-index
176
ISSN
0734-2101
Open access
No
Impact
2.07
Research Topics
Semiconductor materials and devicesMetal and Thin Film MechanicsPlasma Diagnostics and ApplicationsIon-surface interactions and analysisDiamond and Carbon-based Materials ResearchElectron and X-Ray Spectroscopy TechniquesCopper Interconnects and ReliabilityZnO doping and propertiesSurface and Thin Film PhenomenaElectronic and Structural Properties of Oxides