Journal
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
American Institute of Physics. Semiconductor materials and devices. 11,784 works and 241,962 citations indexed by CitedEvidence.
Works
11,784
Citations
241,962
H-index
141
ISSN
1071-1023
Open access
No
Impact
Not available
Research Topics
Semiconductor materials and devicesAdvancements in Photolithography TechniquesSemiconductor Quantum Structures and DevicesIntegrated Circuits and Semiconductor Failure AnalysisElectron and X-Ray Spectroscopy TechniquesForce Microscopy Techniques and ApplicationsMetal and Thin Film MechanicsIon-surface interactions and analysisSurface and Thin Film PhenomenaSemiconductor materials and interfaces