Journal
Microelectronic Engineering
Elsevier BV. Semiconductor materials and devices. 14,081 works and 201,338 citations indexed by CitedEvidence.
Works
14,081
Citations
201,338
H-index
121
ISSN
0167-9317
Open access
No
Impact
2.62
Research Topics
Semiconductor materials and devicesAdvancements in Photolithography TechniquesIntegrated Circuits and Semiconductor Failure AnalysisAdvancements in Semiconductor Devices and Circuit DesignNanofabrication and Lithography TechniquesAdvanced Surface Polishing TechniquesCopper Interconnects and ReliabilitySemiconductor materials and interfacesElectron and X-Ray Spectroscopy TechniquesForce Microscopy Techniques and Applications