Research Topic
Advanced MEMS and NEMS Technologies
This cluster of papers covers a wide range of topics related to Microelectromechanical Systems (MEMS), including silicon properties, microfabrication techniques, resonators, actuators, sensors, reliability issues, RF switches, nanomechanical testing, and thermal behavior.
Works
68,361
Citations
661,537
Domain
Physical Sciences
Field
Engineering
Subfield
Electrical and Electronic Engineering
OpenAlex ID
T10369
Taxonomy Context
Physical Sciences / Engineering / Electrical and Electronic Engineering
Related Topics
Advancements in Battery MaterialsOrganic Electronics and PhotovoltaicsAdvanced Wireless Communication TechniquesAdvanced MIMO Systems OptimizationAdvanced DC-DC ConvertersRadio Frequency Integrated Circuit DesignAdvanced Fiber Optic SensorsElectrochemical sensors and biosensorsMultilevel Inverters and ConvertersOptical Network TechnologiesPerovskite Materials and ApplicationsMicrowave Engineering and Waveguides