Book Chapter10.1007/978-3-662-03838-3_20

A Low Cost Angular Rate Sensor for Automotive Applications in Surface Micromachining Technology

R. Schellin,A. Thomae,Markus Lang,W. Bauer,J. Mohaupt,G. Bischopink+8 more-1999-01-01

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Keywords

Surface micromachiningAutomotive industryTilt (camera)Tilt sensorMaterials scienceSIGNAL (programming language)AcousticsElectrical engineering

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