Advanced fabrication, simulation, and characterization of single and multichannel miniature ion trap chemical sensors

TL;DRAbstract

With miniature mass spectrometry high performance chemical analysis becomes available to the broader community. In areas of defense, law enforcement, pharmaceutical science, and research industries such portable instrumentation begins to fill technology gaps, increase safety and efficiency, decrease sample preparation time, and decrease lead time waiting for results. A key technology facilitating miniature mass spectrometry is the ion trap mass analyzer. In this thesis miniature ion traps have demonstrated lower RF voltage, lower power, increased mass range, smaller form factor, ion trap and circuit integration, increased trapping capacity through arrays, the use of wideband power amplifiers, and amenability to planar and other alternative fabrication strategies all of which can significantly reduce device size and cost. Several obstacles associated with the miniaturization process have been investigated through simulation and experiment in order to mitigate their effects. First, limit

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