Parylene coated microspheres: Operational parameters and round robin results
TL;DRAbstract
Achieving less than 0.1 micrometer defect and close thickness tolerances with parylene coatings has proven a challenge. Los Alamos has investigated how some parameters of coater design and operation affect coating quality. Numerous coater configurations (home-built and commercial) are being used at our Laboratory and elsewhere. In an effort to evaluate the ability of these various types of units to meet desired tolerances, we ran a round robin evaluation involving six coating operations (US and UK). Each participant received an identical and precharacterized set of targets. Results of both the round robin and coater design/operation evaluation are presented.
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Achieving less than 0.1 micrometer defect and close thickness tolerances with parylene coatings has proven a challenge. Los Alamos has investigated how some parameters of coater design and operation affect coating quality. Numerous coater configurations (home-built and commercial) are being used at our Laboratory and elsewhere. In an effort to evaluate the ability of these various types of units to meet desired tolerances, we ran a round robin evaluation involving six coating operations (US and UK). Each participant received an identical and precharacterized set of targets. Results of both the round robin and coater design/operation evaluation are presented.
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