Mass-spectroscopy and modeling of capacitive coupled hydrogen plasmas

TL;DRAbstract

This work presents the characterization of a radio-frequency, capacitively coupled, symmetric, hydrogen plasma. Both steady-state operation and the time-prole of the afterglow when RF power is terminated are investigated. Fluxes of the hydrogen ions, H+ , H+2, H+3, at the grounded electrode are measured with an energy-resolved mass spectrometer. Spatial proles of the electron density are measured using a hairpin probe. Particle-in-cell simulations including a complex hydrogen chemistry are performed which enable direct comparison to the experiment.
\nIn the steady-state operation, the electron density increases with both power and pressure, and the ion flux magnitudes and energy distributions are found to vary with power. The H+3 ion flux decreases with power and pressure, whereas the H+ and H+2 ion fluxes increase with power and pressure, with approximately equal fluxes at the highest pressure/power combination of 30.0 Pa and 750V peak-to-peak. In conjunction with the PIC results,

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