Article10.1023/a:1012461728470
Optimization of pre-metal Dielectric (PMD) materials
Yong‐Jin Seo,Sang-Yong Kim,Woo-Sun Lee-2001-09-01-Journal of Materials Science Materials in Electronics
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Keywords
Materials scienceSilicon nitrideOxideSilicon oxynitrideSilicon oxideSiliconOptoelectronicsComposite material
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