Book Chapter10.1007/978-3-642-51724-2_28

Seismic Test on Turbo-Molecular Pumps Levitated by Active Magnetic Bearing

Yukio MURAI,Katsuhide Watanabe,Youichi Kanemitsu-1989-01-01

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Keywords

Magnetic bearingBearing (navigation)VibrationStructural engineeringEarthquake shaking tableEngineeringTurboStiffness

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