Article10.1016/j.tsf.2015.07.059
Ellipsometry study of process deposition of amorphous Indium Gallium Zinc Oxide sputtered thin films
Clément Talagrand,X. Boddaert,Dániel Selmeczi,Christophe Defranoux,P. Collot-2015-07-29-Thin Solid Films
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Keywords
Materials scienceEllipsometryThin filmDeposition (geology)Amorphous solidRefractive indexMolar absorptivityOptics
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