The Brookhaven Superconducting X-Ray Lithography Source (SXLS)
TL;DRAbstract
Synchrotron radiation from dipole magnets in electron storage rings has emerged as a useful source of x-rays for lithography. The goal of the SXLS Project at BNL is to design and construct a compact storage ring of circumference, C = 8.503 meters. It will use superconducting dipoles with a field of B{sub 0} = 3.87 Tesla and bending radius of {rho} = .6037 meters along with 700 MeV electrons to produce 10 angstrom x-rays for lithography. The project is proceeding in two phases: in Phase I low field iron dipoles are being used; in Phase II the low field dipoles will be replaced with superconducting dipoles. An overview of the design and status report are presented.
Chat with Paper
AI Agents for this Paper
Synchrotron radiation from dipole magnets in electron storage rings has emerged as a useful source of x-rays for lithography. The goal of the SXLS Project at BNL is to design and construct a compact storage ring of circumference, C = 8.503 meters. It will use superconducting dipoles with a field of B{sub 0} = 3.87 Tesla and bending radius of {rho} = .6037 meters along with 700 MeV electrons to produce 10 angstrom x-rays for lithography. The project is proceeding in two phases: in Phase I low field iron dipoles are being used; in Phase II the low field dipoles will be replaced with superconducting dipoles. An overview of the design and status report are presented.
Keywords
Chat
Click to start Chat