Book Chapter10.1007/978-1-4684-1345-8_1

Cathodic Sputtering as a Tool for the High-Tc Superconducting Materials Processing

K. Wasa,H. Adachi,Yo Ichikawa,Kumiko Hirochi,Toshiya Matsushima,Akira Enokihara+3 more-1990-01-01

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Keywords

SputteringCathodic protectionMaterials scienceDeposition (geology)Thin filmMicrofabricationEvaporationSuperconductivity

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