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Wpływ stanu powierzchni i krzemu na pomiar rezystywności metodą "oporności rozpływu" = The influence of the surface conditions on the resistivity measurements of silicon by the spreading resistance method

Brzozowski Andrzej-1982-01-01

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Keywords

Electronic materialsMaterials scienceSiliconSurface (topology)Analytical Chemistry (journal)Composite materialOptoelectronicsNanotechnology

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