Book Chapter10.1007/978-94-017-0633-9_51

Optical Measurements of Gas Temperature in Microwave Discharge Plasma in Hydrogen

Р. А. Ахмеджанов,D.B. Radishev-1999-01-01

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Keywords

MicrowaveDiamondPlasmaChemical vapor depositionIon sourceHydrogenMaterials scienceAnalytical Chemistry (journal)

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