Robust design of selectively compliant flexure-based precision mechanisms

TL;DRAbstract

Nano-scale positioning and metrology are at the cutting edge of motion control technology, driven by ever-increasing number of applications, including semiconductor fabrication, data storage, nano-fabrication, biotechnology among others.In this 'very small range (few m) and very high precision (few nm) domain', flexure-based mechanisms are the preferred means for the motion guiding systems, because of several exceptional properties like selective compliance, monolithic design, absence of friction, hysteresis, and wear.However, despite their numerous advantages, their motion characteristics are extremely sensitive to thermal variations, material property variations, machining tolerances among others.The geometric errors induced by machining process variations interact with the mechanism geometry, and lead to parasitic motion in directions other than the mechanism degrees of freedom.These errors cannot be completely eliminated by calibration, as they are coupled with the desired mechanis

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