Book Chapter10.1007/978-3-642-59497-7_117

Miniaturized pressure sensor using a free hanging strain-gauge with leverage effect for increased sensitivity

Patrik Melvås,Edvard Kälvesten,Peter Enoksson,Göran Stemme-2001-01-01

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Keywords

Strain gaugeDiaphragm (acoustics)Materials sciencePressure sensorSensitivity (control systems)ChipBeam (structure)Acoustics

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