Book Chapter10.1007/978-3-642-25414-7_1

Laser-Assisted Scanning Probe Alloying Nanolithography (LASPAN)

Luohan Peng,Huiliang Zhang,Philip Hemmer,Hong Liang-2012-01-01-Nanoscience and technology

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Keywords

NanolithographyMaterials scienceNanotechnologyNanostructureSiliconNanoscopic scaleNanometreDip-pen nanolithography

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